JPH079406Y2 - 高繰り返しパルスガスレーザ装置 - Google Patents

高繰り返しパルスガスレーザ装置

Info

Publication number
JPH079406Y2
JPH079406Y2 JP999288U JP999288U JPH079406Y2 JP H079406 Y2 JPH079406 Y2 JP H079406Y2 JP 999288 U JP999288 U JP 999288U JP 999288 U JP999288 U JP 999288U JP H079406 Y2 JPH079406 Y2 JP H079406Y2
Authority
JP
Japan
Prior art keywords
discharge
gas
electrode
laser
laser device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP999288U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01115262U (en]
Inventor
紳二 伊藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP999288U priority Critical patent/JPH079406Y2/ja
Publication of JPH01115262U publication Critical patent/JPH01115262U/ja
Application granted granted Critical
Publication of JPH079406Y2 publication Critical patent/JPH079406Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

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  • Lasers (AREA)
JP999288U 1988-01-27 1988-01-27 高繰り返しパルスガスレーザ装置 Expired - Lifetime JPH079406Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP999288U JPH079406Y2 (ja) 1988-01-27 1988-01-27 高繰り返しパルスガスレーザ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP999288U JPH079406Y2 (ja) 1988-01-27 1988-01-27 高繰り返しパルスガスレーザ装置

Publications (2)

Publication Number Publication Date
JPH01115262U JPH01115262U (en]) 1989-08-03
JPH079406Y2 true JPH079406Y2 (ja) 1995-03-06

Family

ID=31217227

Family Applications (1)

Application Number Title Priority Date Filing Date
JP999288U Expired - Lifetime JPH079406Y2 (ja) 1988-01-27 1988-01-27 高繰り返しパルスガスレーザ装置

Country Status (1)

Country Link
JP (1) JPH079406Y2 (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006229137A (ja) * 2005-02-21 2006-08-31 Komatsu Ltd パルス発振型放電励起レーザ装置
JP4579002B2 (ja) * 2005-02-21 2010-11-10 株式会社小松製作所 パルス発振型放電励起レーザ装置

Also Published As

Publication number Publication date
JPH01115262U (en]) 1989-08-03

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